diff --git a/esphome/components/internal_temperature/internal_temperature.cpp b/esphome/components/internal_temperature/internal_temperature.cpp
index 9ef5cbecd5..afa5583e59 100644
--- a/esphome/components/internal_temperature/internal_temperature.cpp
+++ b/esphome/components/internal_temperature/internal_temperature.cpp
@@ -8,8 +8,13 @@ extern "C" {
 uint8_t temprature_sens_read();
 }
 #elif defined(USE_ESP32_VARIANT_ESP32C3) || defined(USE_ESP32_VARIANT_ESP32C6) || \
-    defined(USE_ESP32_VARIANT_ESP32S2) || defined(USE_ESP32_VARIANT_ESP32S3)
+    defined(USE_ESP32_VARIANT_ESP32S2) || defined(USE_ESP32_VARIANT_ESP32S3) || defined(USE_ESP32_VARIANT_ESP32H2) || \
+    defined(USE_ESP32_VARIANT_ESP32C2)
+#if ESP_IDF_VERSION < ESP_IDF_VERSION_VAL(5, 0, 0)
 #include "driver/temp_sensor.h"
+#else
+#include "driver/temperature_sensor.h"
+#endif  // ESP_IDF_VERSION < ESP_IDF_VERSION_VAL(5, 0, 0)
 #endif  // USE_ESP32_VARIANT
 #endif  // USE_ESP32
 #ifdef USE_RP2040
@@ -25,6 +30,13 @@ namespace esphome {
 namespace internal_temperature {
 
 static const char *const TAG = "internal_temperature";
+#ifdef USE_ESP32
+#if (ESP_IDF_VERSION >= ESP_IDF_VERSION_VAL(5, 0, 0)) && \
+    (defined(USE_ESP32_VARIANT_ESP32C3) || defined(USE_ESP32_VARIANT_ESP32C6) || defined(USE_ESP32_VARIANT_ESP32S2) || \
+     defined(USE_ESP32_VARIANT_ESP32S3) || defined(USE_ESP32_VARIANT_ESP32H2) || defined(USE_ESP32_VARIANT_ESP32C2))
+static temperature_sensor_handle_t tsensNew = NULL;
+#endif  // ESP_IDF_VERSION >= ESP_IDF_VERSION_VAL(5, 0, 0) && USE_ESP32_VARIANT
+#endif  // USE_ESP32
 
 void InternalTemperatureSensor::update() {
   float temperature = NAN;
@@ -36,7 +48,9 @@ void InternalTemperatureSensor::update() {
   temperature = (raw - 32) / 1.8f;
   success = (raw != 128);
 #elif defined(USE_ESP32_VARIANT_ESP32C3) || defined(USE_ESP32_VARIANT_ESP32C6) || \
-    defined(USE_ESP32_VARIANT_ESP32S2) || defined(USE_ESP32_VARIANT_ESP32S3)
+    defined(USE_ESP32_VARIANT_ESP32S2) || defined(USE_ESP32_VARIANT_ESP32S3) || defined(USE_ESP32_VARIANT_ESP32H2) || \
+    defined(USE_ESP32_VARIANT_ESP32C2)
+#if ESP_IDF_VERSION < ESP_IDF_VERSION_VAL(5, 0, 0)
   temp_sensor_config_t tsens = TSENS_CONFIG_DEFAULT();
   temp_sensor_set_config(tsens);
   temp_sensor_start();
@@ -47,6 +61,13 @@ void InternalTemperatureSensor::update() {
   esp_err_t result = temp_sensor_read_celsius(&temperature);
   temp_sensor_stop();
   success = (result == ESP_OK);
+#else
+  esp_err_t result = temperature_sensor_get_celsius(tsensNew, &temperature);
+  success = (result == ESP_OK);
+  if (!success) {
+    ESP_LOGE(TAG, "Failed to get temperature: %d", result);
+  }
+#endif  // ESP_IDF_VERSION < ESP_IDF_VERSION_VAL(5, 0, 0)
 #endif  // USE_ESP32_VARIANT
 #endif  // USE_ESP32
 #ifdef USE_RP2040
@@ -75,6 +96,32 @@ void InternalTemperatureSensor::update() {
   }
 }
 
+void InternalTemperatureSensor::setup() {
+#ifdef USE_ESP32
+#if (ESP_IDF_VERSION >= ESP_IDF_VERSION_VAL(5, 0, 0)) && \
+    (defined(USE_ESP32_VARIANT_ESP32C3) || defined(USE_ESP32_VARIANT_ESP32C6) || defined(USE_ESP32_VARIANT_ESP32S2) || \
+     defined(USE_ESP32_VARIANT_ESP32S3) || defined(USE_ESP32_VARIANT_ESP32H2) || defined(USE_ESP32_VARIANT_ESP32C2))
+  ESP_LOGCONFIG(TAG, "Setting up temperature sensor...");
+
+  temperature_sensor_config_t tsens_config = TEMPERATURE_SENSOR_CONFIG_DEFAULT(-10, 80);
+
+  esp_err_t result = temperature_sensor_install(&tsens_config, &tsensNew);
+  if (result != ESP_OK) {
+    ESP_LOGE(TAG, "Failed to install temperature sensor: %d", result);
+    this->mark_failed();
+    return;
+  }
+
+  result = temperature_sensor_enable(tsensNew);
+  if (result != ESP_OK) {
+    ESP_LOGE(TAG, "Failed to enable temperature sensor: %d", result);
+    this->mark_failed();
+    return;
+  }
+#endif  // ESP_IDF_VERSION >= ESP_IDF_VERSION_VAL(5, 0, 0) && USE_ESP32_VARIANT
+#endif  // USE_ESP32
+}
+
 void InternalTemperatureSensor::dump_config() { LOG_SENSOR("", "Internal Temperature Sensor", this); }
 
 }  // namespace internal_temperature
diff --git a/esphome/components/internal_temperature/internal_temperature.h b/esphome/components/internal_temperature/internal_temperature.h
index 0e46a69769..78e3bcef7d 100644
--- a/esphome/components/internal_temperature/internal_temperature.h
+++ b/esphome/components/internal_temperature/internal_temperature.h
@@ -8,6 +8,7 @@ namespace internal_temperature {
 
 class InternalTemperatureSensor : public sensor::Sensor, public PollingComponent {
  public:
+  void setup() override;
   void dump_config() override;
 
   void update() override;